ST.CERA is a leading manufacturer in nonporous technical ceramics for wafer processing equipment, we continuously optimize and upgrade the manufacturing process of semiconductor ceramics to achieve better product quality and increase the durability of products: high alumina ceramic arm, robot end effector, ceramic wafer chuck, wafer handling & processing components, and customized products.

With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time.
Made from high-purity ceramic powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, the ceramic End Effector could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃.
The ceramic End Effector with cavity can work in a high temperature of 800℃ due to unique ceramic bonding technology.

Currently available materials:

• Alumina (Al2O3 Aluminium Oxide), purity: 95%, 99%, 99.5%, 99.7%, 99.9%,
• Zirconia (ZrO2, Zirconium Oxide) and YSZ (Yttria-stabilized Zirconia)
• Silicon Carbide (SiC)
• ESD Alumina and ESD Zirconia ceramic
• Combined with SUS or sapphire materials
• Surface ESD coating service

Not sure which material is suitable for your application? Check out by clicking above guides or simply contact us, we will happy to help out.

We serve customers in Semiconductor Industry worldwide. Semiconductor ceramic parts are normally non-standard and manufactured according to customer requirements. On the right are some of our ceramic End Effector, we can also customize according to your drawings or samples.