ST.CERA can offer non-standard and standard industrial ceramic spare parts used in semiconductor equipment, such as EFEM system, Etch system, CVD and PVD equipment etc..
Products like industrial ceramic rings, ceramic seals, ceramic washers, ceramic bushings, ceramic bearings, ceramic dome and threaded rings etc. Regular/irregular shapes, boreholes, notching, and screw thread, a variety of machining processes are available.

The critical process of semiconductor field needs to be done in clean and dustless environment, especially for those devices should be used in high temperature, vacuum and corrosive gas environment. However, ceramics can maintain high stability in complicated physical and chemical environment.

Be made of high-purity ceramic and shaped by cold isostatic pressing, high temperature sintering and precision machining and polishing, the ceramic spare parts we produced can meet the strict requirements of parts for semiconductor equipment with its features of wear resistance, corrosion resistance, low thermal expansion, insulation.

Currently available materials:

• Alumina (Al2O3 Aluminium Oxide), purity: 95%, 99%, 99.5%, 99.7%, 99.8%, 99.9%,
• Zirconia (ZrO2, Zirconium Oxide) and YSZ (Yttria-stabilized Zirconia)
• Silicon Carbide (SiC)
• ESD Alumina and ESD Zirconia ceramic
• Combined with SUS or sapphire materials
• Surface ESD coating service

Not sure which material is suitable for your application? Check out by clicking above guides or simply contact us, we will happy to help out.

On the right are some of our ceramic spare parts, we can also customize according to your drawings or samples.