With features of high temperature resistance, corrosion resistance, abrasion resistance and insulation, ceramic can work in many kinds of semiconductor production equipment with condition of high temperature, vacuum or corrosive gas for a long time. 

Made from high-purity alumina powder, processed by cold isostatic pressing, high temperature sintering and precision finishing, the ceramic End Effector could reach the dimension tolerance to ±0.001 mm, surface finish Ra 0.1, temperature resistance 1600℃. 

The ceramic End Effector with cavity can work in a high temperature of 800℃ due to unique ceramic bonding technology.

The available materials include Alumina, Zirconia, Silicon Carbide, and anti-static ceramic materials.

On the right are some of our ceramic End Effector, we can also customize according to your drawings or samples.